The LIGA process utilizes which type of radiation for lithography? (i)

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Module 3: Fabrication Techniques

2025?m

The LIGA process utilizes which type of radiation for lithography?

(i) Ultraviolet (UV)
(ii) X-ray
(iii) Infrared
(iv) Visible Light

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Answer: (ii) X-ray

LIGA uses deep X-ray lithography to create high-aspect-ratio microstructures. The X-rays expose a thick resist, traditionally PMMA, through a mask.

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