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Module 1: MEMS Overview

2025?m

Which etching process is isotropic in nature?

(i) Wet Chemical Etching
(ii) Deep Reactive Ion Etching (DRIE)
(iii) Plasma Etching
(iv) Ion Beam Milling

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Answer: (i) Wet Chemical Etching

Wet chemical etching is generally isotropic, meaning material is removed at approximately similar rates in different directions. This can cause lateral undercutting beneath a mask. Some wet etchants can be crystal-orientation dependent, but in the standard classification used in this question, wet etching is treated as isotropic.

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