PyQdeck LogoPyQdeckSubjectsSyllabusBlog

Micro Electro Mechanical System (MEMS) Technology

100620

6 modules · 29 topics

Module 1Introduction to MEMS and Microfabrication6 topics
  • History of MEMS Development
  • Characteristics of MEMS
  • Miniaturization and Microelectronics integration
  • Mass fabrication with precision and Microfabrication
  • Microelectronics fabrication process — Silicon based MEMS processes, New material and fabrication processing
  • Points of consideration for processing
Module 2Electrical and Mechanical Properties of MEMS Materials7 topics
  • Conductivity of semiconductors
  • Crystal plane and orientation
  • Stress and strain — Definition and Relationship between tensile stress and strain
  • Mechanical properties of silicon and thin films
  • Flexural beam bending analysis under single loading condition
  • Types of beam — Deflection of beam, Longitudinal strain under pure bending, Spring constant
  • Tensional deflection, Intrinsic stress, Resonance and Quality factor
Module 3Sensing and Actuation5 topics
  • Electrostatic sensing and actuation — Parallel plate capacitor, Application-Inertial sensor, Pressure sensor and tactile sensor, Parallel plate actuator and Comb drive
  • Thermal sensing and Actuations — Thermal sensors, Thermal actuators, Application-Inertial, Flow and Infrared sensors
  • Piezoresistive sensors — Piezoresistive sensor material, Stress in flexural cantilever and membrane, Application-Inertial, pressure, flow and tactile sensor
  • Piezoelectric sensing and actuation — Piezoelectric material properties (quartz, PZT, PVDF, ZnO), Application-Inertial, Acoustic, tactile, flow-surface elastic waves
  • Magnetic actuation — Micro magnetic actuation principle, Deposition of magnetic materials, Design and fabrication of magnetic coil
Module 4Bulk and Surface Micromachining6 topics
  • Anisotropic wet etching
  • Dry etching of silicon
  • Deep reactive ion etching (DRIE)
  • Isotropic wet etching
  • Basic surface micromachining process, Structural and sacrificial material
  • Stiction and anti-stiction methods and Foundry process
Module 5Polymer MEMS2 topics
  • Polymers in MEMS — Polyimide-SU-8, Liquid crystal polymer (LCP), PDMS, PMMA, Parylene, Fluorocarbon
  • Application — Acceleration, Pressure, flow and tactile sensors
Module 6Optical MEMS3 topics
  • Optical MEMS — Refraction, diffraction, MOEMS components
  • Digital mirror display (DMD)
  • Grating light valve (GLV) and Optical scanners
Theory