Write a short note on: MEMS technology

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Accepted Answer

## Short note: MEMS technology

MEMS (Micro-Electro-Mechanical Systems) technology combines micro-sized mechanical structures, sensors, actuators and electronics on one chip, made by silicon micro-fabrication.

```mermaid
flowchart LR
    A[Design and mask] --> B[Deposition and lithography]
    B --> C[Etching and micromachining]
    C --> D[Release]
    D --> E[Packaging and test]
```

- **Fabrication:** bulk micromachining, surface micromachining, LIGA and soft lithography.
- **Features:** miniaturisation, low power, batch production, integration with ICs.
- **Materials:** silicon, polysilicon, silicon nitride, glass, polymers, piezoelectric films.
- **Typical devices:** accelerometers, pressure sensors, gyroscopes, micromirrors, microphones, microfluidic chips.
- **Challenges:** stiction, packaging cost, reliability and calibration.

### Exam tip
One definition, one flow diagram, and one list of features and applications is enough for a short note.

Short note: MEMS technology

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