Write a short note on: MEMS sensors and Actuators

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## Short note: MEMS sensors and actuators

A **sensor** converts a physical quantity (pressure, acceleration, temperature, flow) into an electrical signal. An **actuator** converts an electrical signal into motion, force or fluid movement.

```mermaid
flowchart LR
    A[Physical input] --> B[MEMS sensor]
    B --> C[Electronics and controller]
    C --> D[MEMS actuator]
    D --> E[Motion, force or flow]
```

| | Sensor | Actuator |
|---|---|---|
| Principles | Piezoresistive, capacitive, piezoelectric, thermal | Electrostatic, thermal, piezoelectric, electromagnetic |
| Examples | Pressure sensor, accelerometer, gyroscope | Micromirror, micropump, microvalve, microgripper |
| Output | Electrical signal | Mechanical or fluidic action |

Together they form a closed loop: the sensor measures, the controller decides, and the actuator acts.

### Exam tip
Use a two-column comparison table with at least two principles and two examples each.

Short note: MEMS sensors and actuators

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