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Module 3: Fabrication Techniques

2025?m

SU-8 is an example of:

(i) Positive Photoresist
(ii) Negative Photoresist
(iii) Electron Beam Resist
(iv) Inorganic Resist

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Answer: (ii) Negative Photoresist

SU-8 is an epoxy-based negative photoresist. The exposed regions polymerize and become resistant to the developer, allowing high-aspect-ratio microstructures to be formed.

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