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Bio MEMSA microfluidic valve is primarily used to: (i) Control fluid flow (ii) Generate UV radiation (iii) Perform lithography (iv) Detect cell morphology20262mBio MEMSThe primary purpose of photolithography in MEMS fabrication is to: (i) Increase the thickness of a substrate (ii) Remove all deposited material (iii) Transfer a pattern onto a substrate (iv) Measure fluid pressure20262mBio MEMSThe primary function of a micropump in a microfluidic system is to: (i) Pattern the substrate (ii) Drive or transport fluid (iii) Detect biological molecules only (iv) Deposit thin films20262mBio MEMSExplain UV lithography for SU-8. Describe the major steps involved in pattern formation.20267m
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