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Module 3: Fabrication Techniques

20262m

A major objective of lithography in MEMS fabrication is to achieve:

(i) Controlled pattern definition
(ii) Fluid sterilization
(iii) Cell growth only
(iv) Mechanical packaging only

Worked SolutionAI Assisted

Answer: (i) Controlled pattern definition

Lithography fixes the size, shape and position of features, so later etching or deposition acts only where intended.

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