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Bio MEMSThe primary purpose of photolithography in MEMS fabrication is to: (i) Increase the thickness of a substrate (ii) Remove all deposited material (iii) Transfer a pattern onto a substrate (iv) Measure fluid pressure20262mBio MEMSDescribe the principle and process of photolithography used in MEMS fabrication.20267mBio MEMSA microfluidic valve is primarily used to: (i) Control fluid flow (ii) Generate UV radiation (iii) Perform lithography (iv) Detect cell morphology20262mBio MEMSMicrofluidic strategies for Lab-on-Chip systems may be used for: (i) Sample transport and processing (ii) Only external power generation (iii) Only mechanical packaging (iv) Only substrate polishing20262m
PreviousIn UV lithography, ultraviolet radiation is primarily used to: (i) Pattern a photosensitive material (ii) Pump fluid directly (iii) Concentrate biological cells (iv) Measure fluid pressureNextMicrofluidic strategies for Lab-on-Chip systems may be used for: (i) Sample transport and processing (ii) Only external power generation (iii) Only mechanical packaging (iv) Only substrate polishing
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