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Module 3: Fabrication Techniques

20262m

Which sequence most appropriately represents the basic microfabrication flow?

(i) Etching → Lithography → Deposition
(ii) Deposition → Lithography → Etching
(iii) Lithography → Etching → Packaging only
(iv) Packaging → Lithography → Deposition

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Answer: (ii) Deposition → Lithography → Etching

A thin film is deposited first, lithography then defines the pattern in photoresist, and etching transfers that pattern into the film. Packaging comes last, after the device is released and tested.

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